Perfluoroelastomers (FFKMs) Dupont Kalrez® are used as seals on wafer processing equipment due to their extraordinary resistance to chemicals, including reactive plasmas and extreme heat as high as 620°F (327°C). FFKM performance can vary depending upon the chemical composition. Specially formulated Kalrez products may be required to help reduce wafer contamination.
Amine treatment is a process typically used for Hydrogen Sulfide removal from natural gas (sour gas). This operation is commonly referred to as gas “sweetening," acid gas removal, or amine scrubbing
Amine units are used all over the world in oil refineries and gas plants to remove hydrogen sulfide (H2S) from a product stream. New environmental standards are more strict and require ever-decreasing contents of H2S in clean natural gas. Most of the new sources of oil and gas discovered today have high contents of H2S which demand more efficient removal technologies (the Shah Gas field in the United Arab Emirates for example has up to 30% H2S).
Amine units operate under harsh chemical environments. H
To meet growing demand in solar cells, the Siemens* process is used to produce highly purified polycrystalline silicon by thermally decomposing tri-chloro-silane (TCS). The reactors employed require three kinds of high-performance seals in the following locations: A) bell jar seals; B) electrode seals between the electrode and ceramic inlet; and C) a gasket for the view port seal (see schematic).
The process involves a very hot, dry environment with temperatures up to 1200°C (2100°F). Sealing components see up to 300°C (572°F). Process media include TCS and aggressive by-products of its decomposition, such as HCl gas. Superior compression set performance is needed for effective sealing and extended seal life. Very low outgassing is a key requirement for preventing contamination of the process environment.
The presence of harsh chemicals in high temperature conditions often require an upgrade from standard sealing materials to PTFE or fluoroelastomers (FKM) to improve thermal stability and chemical resistance. However, PTFE can deform and creep “hot flow” in the bell jar seal increasing the risk of product loss. FKM, with its high temperature rating of 200°C (392°F), also has deficiencies in this 300°C (572°F) environment.
Kalrez PV8070 perfluoroelastomer parts installed as washers and gaskets in reactors for the Siemens CVD process have demonstrated outstanding performance in this demanding application. Kalrez® PV8070 parts are effective seals that provide:
For most applications, DuPont™ Kalrez® Spectrum™ 7375 may be a suitable replacement for 1050LF.
DuPont™ Kalrez® 1050LF perfluoroelastomer parts are a carbon black-filled general-purpose product for o-rings, seals, and other parts used in chemical process industries. It is a classic-grade
Kalrez® parts made from compounds 6221 and 6230 provide superior chemical resistance and low contamination from extractables in pharmaceutical and food handling applications where FDA compliance is required. Compounds 6221 and 6230 are especially suited for Water For Injection (WFI) systems, Steam-in-Place (SIP) cleaning and other critical systems,
Unlike other elastomeric seals made with FDA compliant elastomers, Kalrez perfluoroelastomer parts are thermally stable up to 260°C (500°F), permitting use in applications such as Stage II Sterilization processes, where other elastomers lose their sealing capabilities.