particle generation

Gallagher recently published its Failure Modes of Elastomers in the Semiconductor Industry White Paper, now available for download on our site.  This white paper discusses common issues that occur with elastomer seals in the semiconductor industry. The excerpt below is the fourth and final section of our new white paper, discussing Volatiles (offgassing) and Particle Generation.  To download the white paper in its entirety, visit our Resources Page, or click on the image to the right.

Failure Modes of Elastomers in the Semiconductor Industry

High performance elastomers are found in many applications in the semiconductor industry (see paper titled Perfluoroelastomers in the Semiconductor Industry). Though perfluoroelastomer (FFKM) seals are formulated to meet the highest performance requirements of integrated circuit (chip) manufacturers, even these elastomers can’t solve every sealing application nor will they last forever in service. Additionally, end users need to understand subtle performance differences between perfluoroelastomers in the same product line. For example, one product may be better at minimizing particle generation while another may be better for high temperature services.