High Performance Seals for Polycrystalline Silicon Process Equipment

The Challenge

To meet growing demand in solar cells, the Siemens* process is used to produce highly purified polycrystalline silicon by thermally decomposing tri-chloro-silane (TCS). The reactors employed require three kinds of high-performance seals in the following locations: A) bell jar seals; B) electrode seals between the electrode and ceramic inlet; and C) a gasket for the view port seal (see schematic).

Application Details

The process involves a very hot, dry environment with temperatures up to 1200°C (2100°F). Sealing components see up to 300°C (572°F). Process media include TCS and aggressive by-products of its decomposition, such as HCl gas. Superior compression set performance is needed for effective sealing and extended seal life. Very low outgassing is a key requirement for preventing contamination of the process environment.

The presence of harsh chemicals in high temperature conditions often require an upgrade from standard sealing materials to PTFE or fluoroelastomers (FKM) to improve thermal stability and chemical resistance. However, PTFE can deform and creep “hot flow” in the bell jar seal increasing the risk of product loss. FKM, with its high temperature rating of 200°C (392°F), also has deficiencies in this 300°C (572°F) environment.

The Solution and Key Advantages of Kalrez PV8070

Kalrez PV8070 perfluoroelastomer parts installed as washers and gaskets in reactors for the Siemens CVD process have demonstrated outstanding performance in this demanding application. Kalrez® PV8070 parts are effective seals that provide:

Gallagher recently released our High Performance Elastomer Seals for the Instrumentation Industry White Paper.  This was written by Russ Schnell, an Elastomer Consultant contracted by Gallagher Fluid Seals, and a former Senior Application Engineer with the Kalrez® perfluoroelastomer parts business at DuPont.  This white paper is now available for download on our Resources page.

Below is the third and final section of the white paper, which will discuss the importance of proper seal and groove design.

Proper Seal & Groove Design

Proper seal design is a necessity for elastomer seals to perform reliably over the long term. Many of the instrument applications mentioned above use o-ring seals. The suggested compression for an elastomer o-ring seal to perform properly is typically a minimum of 16%, and a maximum of 30%. However, this range must also take into account the thermal expansion of an elastomer at elevated temperatures as well as any swell due to chemical exposure. Many of the elastomer seals used in instruments are small o-rings, which can create design issues. This is especially true for perfluoroelastomer parts which have a relatively high coefficient of thermal expansion (CTE). Fluoroelastomers have a lower CTE, making seal design easier at elevated temperatures.

FFKMs, also known as perfluoroelastomers, were first developed in the 1960s for applications involving high temperatures and/or aggressive chemicals.  Perfluoroelastomers exhibit many properties similar to PTFE (polytetrafluoroethlyene, or Teflon®), and are considered inert in almost all solvents.  However, PTFE is a plastic, and when compressed, it will not recover to its original shape.  On the other hand, elastomers contain crosslinks, which act as springs to give the material resiliency and the ability to recover after a part has been compressed - this resistance to permanent compression gives the material the ability to maintain a seal over time. (To learn more about perfluoroelastomers, download our Introduction to Perfluoroelastomers White Paper).

The article below was recently published on FlowControlNetwork.com, and discusses how FFKMs are being used in oil & gas exploration, as production companies are increasingly operating in high-pressure, high-temperature (HPHT) downhole conditions.

HOW FFKMS PROTECT COMPONENTS IN ENHANCED OIL RECOVERY OPERATIONS

Companies are increasingly operating in high-pressure, high-temperature downhole conditions.

Improving technologies and methods to increase the recovery of oil from existing reservoirs is a global challenge. In the U.S., oil production at reservoirs can include three phases: primary, secondary and tertiary (or enhanced) recovery. The U.S. Department of Energy (DOE) estimates that primary recovery methods — which rely on the natural pressure of the reservoir or gravity to drive oil into the wellbore, combined with pumps to bring the oil to the surface — typically tap only 10 percent of a reservoir’s oil. Furthermore, secondary efforts to extend a field’s productive life — generally by injecting water or gas to displace oil and drive it to a production wellbore — still only push recovery totals to between 20 and 40 percent of the original oil in place. Clearly, much untapped oil and gas remains in existing wells.

Gallagher recently published its Failure Modes of Elastomers in the Semiconductor Industry White Paper, now available for download on our site.  This white paper discusses common issues that occur with elastomer seals in the semiconductor industry. The excerpt below is the fourth and final section of our new white paper, discussing Volatiles (offgassing) and Particle Generation.  To download the white paper in its entirety, visit our Resources Page, or click on the image to the right.

Failure Modes of Elastomers in the Semiconductor Industry

High performance elastomers are found in many applications in the semiconductor industry (see paper titled Perfluoroelastomers in the Semiconductor Industry). Though perfluoroelastomer (FFKM) seals are formulated to meet the highest performance requirements of integrated circuit (chip) manufacturers, even these elastomers can’t solve every sealing application nor will they last forever in service. Additionally, end users need to understand subtle performance differences between perfluoroelastomers in the same product line. For example, one product may be better at minimizing particle generation while another may be better for high temperature services.

Gallagher recently published its Failure Modes of Elastomers in the Semiconductor Industry White Paper, now available for download on our site.  This white paper discusses common issues that occur with elastomer seals in the semiconductor industry. The excerpt below is the third section of our new white paper, discussing O-Ring Stretch, Chemical Attack, Plasma Cracking, and Permeation.  To download the entire white paper, visit our Resources Page, or click on the image to the right.

Failure Modes of Elastomers in the Semiconductor Industry

High performance elastomers are found in many applications in the semiconductor industry (see paper titled Perfluoroelastomers in the Semiconductor Industry). Though perfluoroelastomer (FFKM) seals are formulated to meet the highest performance requirements of integrated circuit (chip) manufacturers, even these elastomers can’t solve every sealing application nor will they last forever in service. Additionally, end users need to understand subtle performance differences between perfluoroelastomers in the same product line. For example, one product may be better at minimizing particle generation while another may be better for high temperature services.

Gallagher recently published its Failure Modes of Elastomers in the Semiconductor Industry White Paper, now available for download on our site.  This white paper discusses common issues that occur with elastomer seals in the semiconductor industry. The excerpt below is the first section of our new white paper, discussing groove design and seal leakage.  To download the entire white paper, visit our Resources Page, or click on the image to the right.

Failure Modes for Elastomers in the Semiconductor Industry

High performance elastomers are found in many applications in the semiconductor industry (see paper titled Perfluoroelastomers in the Semiconductor Industry). Though perfluoroelastomer (FFKM) seals are formulated to meet the highest performance requirements of integrated circuit (chip) manufacturers, even these elastomers can’t solve every sealing application nor will they last forever in service. Additionally, end users need to understand subtle performance differences between perfluoroelastomers in the same product line. For example, one product may be better at minimizing particle generation while another may be better for high temperature services.