OR-AS 009 FFKM Kalrez 8002

OR-AS 009 FFKM Kalrez 8002
Ships Within: 7-8 Weeks

DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear, transparent product for ashing/stripping and “select” etching and deposition process applications, e.g., SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to “dry” process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8002 parts.

O-Ring Size (AS-568): 009
Inner Diameter (In.): 0.208
Cross Section (In.): 0.070
Specification: Low Particle Generation
O-Ring Size Series: 000 Series