AS-568 FFKM Kalrez 8002

AS-568 FFKM Kalrez 8002

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DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear, transparent product for ashing/stripping and “select” etching and deposition process applications, e.g., SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to “dry” process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8002 parts.

PERFORMANCE & SPECIFICATIONS

DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear, transparent product for ashing/stripping and “select” etching and deposition process applications, e.g., SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to “dry” process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8002 parts.

  •  Performance
    • Temperature Range (F) -15 to 527
    • Ashing/stripping and “select” etching and deposition process applications
    • Ultra-low particle generation in oxygen and fluorine-based plasmas
    • Excellent resistance to “dry” process chemistry
  • Not Compatible Withs
    • Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
    • Perfluorinated lubricants (PFPE)
Inner Diameter
Inner Diameter
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O-Ring Series
O-Ring Series
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Grouped product items
PART NUMBER O-Ring Size (AS-568) Inner Diameter (In.) Cross Section (In.) Specification O-Ring Size Series Ships Within
PRICE
ADD TO CART
OR-AS 001 FFKM Kalrez 8002

O-Ring Size (AS-568) 001

Inner Diameter (In.) 0.029

Cross Section (In.) 0.040

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $24.59
PRICE QTY
$24.59
OR-AS 002 FFKM Kalrez 8002

O-Ring Size (AS-568) 002

Inner Diameter (In.) 0.042

Cross Section (In.) 0.050

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $24.59
PRICE QTY
$24.59
OR-AS 003 FFKM Kalrez 8002

O-Ring Size (AS-568) 003

Inner Diameter (In.) 0.056

Cross Section (In.) 0.060

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $23.69
PRICE QTY
$23.69
OR-AS 004 FFKM Kalrez 8002

O-Ring Size (AS-568) 004

Inner Diameter (In.) 0.070

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $22.41
PRICE QTY
$22.41
OR-AS 005 FFKM Kalrez 8002

O-Ring Size (AS-568) 005

Inner Diameter (In.) 0.101

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $21.88
PRICE QTY
$21.88
OR-AS 006 FFKM Kalrez 8002

O-Ring Size (AS-568) 006

Inner Diameter (In.) 0.114

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $20.85
PRICE QTY
$20.85
OR-AS 007 FFKM Kalrez 8002

O-Ring Size (AS-568) 007

Inner Diameter (In.) 0.145

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $20.85
PRICE QTY
$20.85
OR-AS 008 FFKM Kalrez 8002

O-Ring Size (AS-568) 008

Inner Diameter (In.) 0.176

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $22.02
PRICE QTY
$22.02
OR-AS 009 FFKM Kalrez 8002

O-Ring Size (AS-568) 009

Inner Diameter (In.) 0.208

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $22.41
PRICE QTY
$22.41
OR-AS 010 FFKM Kalrez 8002

O-Ring Size (AS-568) 010

Inner Diameter (In.) 0.239

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $22.92
PRICE QTY
$22.92
OR-AS 011 FFKM Kalrez 8002

O-Ring Size (AS-568) 011

Inner Diameter (In.) 0.300

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $23.70
PRICE QTY
$23.70
OR-AS 012 FFKM Kalrez 8002

O-Ring Size (AS-568) 012

Inner Diameter (In.) 0.364

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $24.59
PRICE QTY
$24.59
OR-AS 013 FFKM Kalrez 8002

O-Ring Size (AS-568) 013

Inner Diameter (In.) 0.426

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $24.71
PRICE QTY
$24.71
OR-AS 014 FFKM Kalrez 8002

O-Ring Size (AS-568) 014

Inner Diameter (In.) 0.489

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $25.11
PRICE QTY
$25.11
OR-AS 015 FFKM Kalrez 8002

O-Ring Size (AS-568) 015

Inner Diameter (In.) 0.551

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $25.75
PRICE QTY
$25.75
OR-AS 016 FFKM Kalrez 8002

O-Ring Size (AS-568) 016

Inner Diameter (In.) 0.614

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $27.17
PRICE QTY
$27.17
OR-AS 017 FFKM Kalrez 8002

O-Ring Size (AS-568) 017

Inner Diameter (In.) 0.676

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $28.07
PRICE QTY
$28.07
OR-AS 018 FFKM Kalrez 8002

O-Ring Size (AS-568) 018

Inner Diameter (In.) 0.739

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $28.98
PRICE QTY
$28.98
OR-AS 019 FFKM Kalrez 8002

O-Ring Size (AS-568) 019

Inner Diameter (In.) 0.801

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $30.76
PRICE QTY
$30.76
OR-AS 020 FFKM Kalrez 8002

O-Ring Size (AS-568) 020

Inner Diameter (In.) 0.864

Cross Section (In.) 0.070

Specification Low Particle Generation

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $32.84
PRICE QTY
$32.84