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- AS-568 FFKM Kalrez 8002
AS-568 FFKM Kalrez 8002
DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear, transparent product for ashing/stripping and “select” etching and deposition process applications, e.g., SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to “dry” process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8002 parts.
- Performance
- Temperature Range (F) -15 to 527
- Ashing/stripping and “select” etching and deposition process applications
- Ultra-low particle generation in oxygen and fluorine-based plasmas
- Excellent resistance to “dry” process chemistry
- Not Compatible Withs
- Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
- Perfluorinated lubricants (PFPE)
- Material Datasheets
| PART NUMBER | O-Ring Size (AS-568) | Inner Diameter (In.) | Cross Section (In.) | Specification | O-Ring Size Series | Ships Within |
PRICE
|
ADD TO CART | ||
|---|---|---|---|---|---|---|---|---|---|---|
| OR-AS 001 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 001 Inner Diameter (In.) : 0.029 Cross Section (In.) : 0.040 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
001 | 0.029 | 0.040 | Low Particle Generation | 000 Series | 7-8 Weeks |
$23.11
|
Starting at: $23.11 | |
| OR-AS 002 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 002 Inner Diameter (In.) : 0.042 Cross Section (In.) : 0.050 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
002 | 0.042 | 0.050 | Low Particle Generation | 000 Series | 7-8 Weeks |
$23.11
|
Starting at: $23.11 | |
| OR-AS 003 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 003 Inner Diameter (In.) : 0.056 Cross Section (In.) : 0.060 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
003 | 0.056 | 0.060 | Low Particle Generation | 000 Series | 7-8 Weeks |
$22.27
|
Starting at: $22.27 | |
| OR-AS 004 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 004 Inner Diameter (In.) : 0.070 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
004 | 0.070 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$21.06
|
Starting at: $21.06 | |
| OR-AS 005 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 005 Inner Diameter (In.) : 0.101 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
005 | 0.101 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$20.57
|
Starting at: $20.57 | |
| OR-AS 006 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 006 Inner Diameter (In.) : 0.114 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
006 | 0.114 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$19.60
|
Starting at: $19.60 | |
| OR-AS 007 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 007 Inner Diameter (In.) : 0.145 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
007 | 0.145 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$19.60
|
Starting at: $19.60 | |
| OR-AS 008 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 008 Inner Diameter (In.) : 0.176 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
008 | 0.176 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$20.69
|
Starting at: $20.69 | |
| OR-AS 009 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 009 Inner Diameter (In.) : 0.208 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
009 | 0.208 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$21.06
|
Starting at: $21.06 | |
| OR-AS 010 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 010 Inner Diameter (In.) : 0.239 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
010 | 0.239 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$21.54
|
Starting at: $21.54 | |
| OR-AS 011 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 011 Inner Diameter (In.) : 0.301 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
011 | 0.301 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$22.27
|
Starting at: $22.27 | |
| OR-AS 012 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 012 Inner Diameter (In.) : 0.364 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
012 | 0.364 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$23.11
|
Starting at: $23.11 | |
| OR-AS 013 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 013 Inner Diameter (In.) : 0.426 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
013 | 0.426 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$23.23
|
Starting at: $23.23 | |
| OR-AS 014 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 014 Inner Diameter (In.) : 0.489 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
014 | 0.489 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$23.60
|
Starting at: $23.60 | |
| OR-AS 015 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 015 Inner Diameter (In.) : 0.551 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
015 | 0.551 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$24.20
|
Starting at: $24.20 | |
| OR-AS 016 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 016 Inner Diameter (In.) : 0.614 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
016 | 0.614 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$25.53
|
Starting at: $25.53 | |
| OR-AS 017 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 017 Inner Diameter (In.) : 0.676 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
017 | 0.676 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$26.38
|
Starting at: $26.38 | |
| OR-AS 018 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 018 Inner Diameter (In.) : 0.739 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
018 | 0.739 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$27.23
|
Starting at: $27.23 | |
| OR-AS 019 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 019 Inner Diameter (In.) : 0.801 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
019 | 0.801 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$28.91
|
Starting at: $28.91 | |
| OR-AS 020 FFKM Kalrez 8002 |
O-Ring Size (AS-568) : 020 Inner Diameter (In.) : 0.864 Cross Section (In.) : 0.070 Specification : Low Particle Generation O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more |
020 | 0.864 | 0.070 | Low Particle Generation | 000 Series | 7-8 Weeks |
$30.86
|
Starting at: $30.86 |