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AS-568 FFKM Kalrez 8002
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DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear, transparent product for ashing/stripping and “select” etching and deposition process applications, e.g., SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to “dry” process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8002 parts.
PERFORMANCE & SPECIFICATIONS
DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear, transparent product for ashing/stripping and “select” etching and deposition process applications, e.g., SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to “dry” process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8002 parts.
- Performance
- Temperature Range (F) -15 to 527
- Ashing/stripping and “select” etching and deposition process applications
- Ultra-low particle generation in oxygen and fluorine-based plasmas
- Excellent resistance to “dry” process chemistry
- Not Compatible Withs
- Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
- Perfluorinated lubricants (PFPE)
- Material Datasheets
| PART NUMBER | O-Ring Size (AS-568) | Inner Diameter (In.) | Cross Section (In.) | Specification | O-Ring Size Series | Ships Within |
PRICE
|
ADD TO CART | ||
|---|---|---|---|---|---|---|---|---|---|---|
| OR-AS 001 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 001 Inner Diameter (In.) 0.029 Cross Section (In.) 0.040 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
001 | 0.029 | 0.040 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$24.59
|
Starting at: $24.59 | |
| OR-AS 002 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 002 Inner Diameter (In.) 0.042 Cross Section (In.) 0.050 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
002 | 0.042 | 0.050 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$24.59
|
Starting at: $24.59 | |
| OR-AS 003 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 003 Inner Diameter (In.) 0.056 Cross Section (In.) 0.060 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
003 | 0.056 | 0.060 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$23.69
|
Starting at: $23.69 | |
| OR-AS 004 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 004 Inner Diameter (In.) 0.070 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
004 | 0.070 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$22.41
|
Starting at: $22.41 | |
| OR-AS 005 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 005 Inner Diameter (In.) 0.101 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
005 | 0.101 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$21.88
|
Starting at: $21.88 | |
| OR-AS 006 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 006 Inner Diameter (In.) 0.114 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
006 | 0.114 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$20.85
|
Starting at: $20.85 | |
| OR-AS 007 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 007 Inner Diameter (In.) 0.145 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
007 | 0.145 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$20.85
|
Starting at: $20.85 | |
| OR-AS 008 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 008 Inner Diameter (In.) 0.176 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
008 | 0.176 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$22.02
|
Starting at: $22.02 | |
| OR-AS 009 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 009 Inner Diameter (In.) 0.208 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
009 | 0.208 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$22.41
|
Starting at: $22.41 | |
| OR-AS 010 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 010 Inner Diameter (In.) 0.239 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
010 | 0.239 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$22.92
|
Starting at: $22.92 | |
| OR-AS 011 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 011 Inner Diameter (In.) 0.300 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
011 | 0.300 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$23.70
|
Starting at: $23.70 | |
| OR-AS 012 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 012 Inner Diameter (In.) 0.364 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
012 | 0.364 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$24.59
|
Starting at: $24.59 | |
| OR-AS 013 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 013 Inner Diameter (In.) 0.426 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
013 | 0.426 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$24.71
|
Starting at: $24.71 | |
| OR-AS 014 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 014 Inner Diameter (In.) 0.489 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
014 | 0.489 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$25.11
|
Starting at: $25.11 | |
| OR-AS 015 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 015 Inner Diameter (In.) 0.551 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
015 | 0.551 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$25.75
|
Starting at: $25.75 | |
| OR-AS 016 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 016 Inner Diameter (In.) 0.614 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
016 | 0.614 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$27.17
|
Starting at: $27.17 | |
| OR-AS 017 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 017 Inner Diameter (In.) 0.676 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
017 | 0.676 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$28.07
|
Starting at: $28.07 | |
| OR-AS 018 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 018 Inner Diameter (In.) 0.739 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
018 | 0.739 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$28.98
|
Starting at: $28.98 | |
| OR-AS 019 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 019 Inner Diameter (In.) 0.801 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
019 | 0.801 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$30.76
|
Starting at: $30.76 | |
| OR-AS 020 FFKM Kalrez 8002 |
O-Ring Size (AS-568) 020 Inner Diameter (In.) 0.864 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 21 Weeks Out of stock 0 See more |
020 | 0.864 | 0.070 | Low Particle Generation | 000 Series | 21 Weeks 0Out of stock |
$32.84
|
Starting at: $32.84 |