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AS-568 FFKM Kalrez 9100

DuPont™ Kalrez® 9100 perfluoroelastomer parts are an amber translucent product targeted specifically for etching and deposition process applications, e.g., HDPCVD, PECVD, ALD, etc. It has also exhibited excellent performance in “select” ashing/stripping processes. Kalrez® 9100 has been specifically designed for low erosion and ultra-low particle generation in harsh plasma environments. It offers excellent thermal stability, very low outgassing as well as excellent elastomer recovery and mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300°C (572°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9100 parts

Performance

Temperature Range (F) -15 to 572
Etching and deposition process applications, e.g., HDPCVD, PECVD, ALD
Designed for low erosion and ultra-low particle generation in harsh plasma environments
Excellent thermal stability, very low outgassing as well as excellent elastomer recovery

Not Compatible Withs

Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
Perfluorinated lubricants (PFPE)

Material Datasheets

Kalrez 9100

Grouped product items
PART NUMBER	O-Ring Size (AS-568)	Inner Diameter (In.)	Cross Section (In.)	Specification	O-Ring Size Series	PRICE	ADD TO CART
OR-AS 001 FFKM Kalrez 9100	O-Ring Size (AS-568) : 001 Inner Diameter (In.) : 0.029 Cross Section (In.) : 0.040 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-ZM3J-212M-212M	001	0.029	0.040	PECVD & HDPCVD	7-8 Weeks	$21.01	Starting at: $21.01	PRICE QTY $21.01
OR-AS 002 FFKM Kalrez 9100	O-Ring Size (AS-568) : 002 Inner Diameter (In.) : 0.042 Cross Section (In.) : 0.050 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-NQA4-07QD-07QD	002	0.042	0.050	PECVD & HDPCVD	7-8 Weeks	$21.01	Starting at: $21.01	PRICE QTY $21.01
OR-AS 003 FFKM Kalrez 9100	O-Ring Size (AS-568) : 003 Inner Diameter (In.) : 0.056 Cross Section (In.) : 0.060 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-7TF9-3XL6-3XL6	003	0.056	0.060	PECVD & HDPCVD	7-8 Weeks	$20.24	Starting at: $20.24	PRICE QTY $20.24
OR-AS 004 FFKM Kalrez 9100	O-Ring Size (AS-568) : 004 Inner Diameter (In.) : 0.070 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-90L8-90L8-90L8	004	0.070	0.070	PECVD & HDPCVD	7-8 Weeks	$19.14	Starting at: $19.14	PRICE QTY $19.14
OR-AS 005 FFKM Kalrez 9100	O-Ring Size (AS-568) : 005 Inner Diameter (In.) : 0.101 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-6TMQ-90L8-90L8	005	0.101	0.070	PECVD & HDPCVD	7-8 Weeks	$18.70	Starting at: $18.70	PRICE QTY $18.70
OR-AS 006 FFKM Kalrez 9100	O-Ring Size (AS-568) : 006 Inner Diameter (In.) : 0.114 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-VJVX-90L8-90L8	006	0.114	0.070	PECVD & HDPCVD	7-8 Weeks	$17.82	Starting at: $17.82	PRICE QTY $17.82
OR-AS 007 FFKM Kalrez 9100	O-Ring Size (AS-568) : 007 Inner Diameter (In.) : 0.145 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-P4ED-90L8-90L8	007	0.145	0.070	PECVD & HDPCVD	7-8 Weeks	$17.82	Starting at: $17.82	PRICE QTY $17.82
OR-AS 008 FFKM Kalrez 9100	O-Ring Size (AS-568) : 008 Inner Diameter (In.) : 0.176 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-MV8H-90L8-90L8	008	0.176	0.070	PECVD & HDPCVD	7-8 Weeks	$18.81	Starting at: $18.81	PRICE QTY $18.81
OR-AS 009 FFKM Kalrez 9100	O-Ring Size (AS-568) : 009 Inner Diameter (In.) : 0.208 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-17B5-90L8-90L8	009	0.208	0.070	PECVD & HDPCVD	7-8 Weeks	$19.14	Starting at: $19.14	PRICE QTY $19.14
OR-AS 010 FFKM Kalrez 9100	O-Ring Size (AS-568) : 010 Inner Diameter (In.) : 0.239 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-JQVV-90L8-90L8	010	0.239	0.070	PECVD & HDPCVD	7-8 Weeks	$19.58	Starting at: $19.58	PRICE QTY $19.58
OR-AS 011 FFKM Kalrez 9100	O-Ring Size (AS-568) : 011 Inner Diameter (In.) : 0.301 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-LK37-90L8-90L8	011	0.301	0.070	PECVD & HDPCVD	7-8 Weeks	$20.24	Starting at: $20.24	PRICE QTY $20.24
OR-AS 012 FFKM Kalrez 9100	O-Ring Size (AS-568) : 012 Inner Diameter (In.) : 0.364 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-8DU4-90L8-90L8	012	0.364	0.070	PECVD & HDPCVD	7-8 Weeks	$21.01	Starting at: $21.01	PRICE QTY $21.01
OR-AS 013 FFKM Kalrez 9100	O-Ring Size (AS-568) : 013 Inner Diameter (In.) : 0.426 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-W7Y7-90L8-90L8	013	0.426	0.070	PECVD & HDPCVD	7-8 Weeks	$21.12	Starting at: $21.12	PRICE QTY $21.12
OR-AS 014 FFKM Kalrez 9100	O-Ring Size (AS-568) : 014 Inner Diameter (In.) : 0.489 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-3K18-90L8-90L8	014	0.489	0.070	PECVD & HDPCVD	7-8 Weeks	$21.46	Starting at: $21.46	PRICE QTY $21.46
OR-AS 015 FFKM Kalrez 9100	O-Ring Size (AS-568) : 015 Inner Diameter (In.) : 0.551 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-N1Y5-90L8-90L8	015	0.551	0.070	PECVD & HDPCVD	7-8 Weeks	$22.00	Starting at: $22.00	PRICE QTY $22.00
OR-AS 016 FFKM Kalrez 9100	O-Ring Size (AS-568) : 016 Inner Diameter (In.) : 0.614 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-KMLK-90L8-90L8	016	0.614	0.070	PECVD & HDPCVD	7-8 Weeks	$23.21	Starting at: $23.21	PRICE QTY $23.21
OR-AS 017 FFKM Kalrez 9100	O-Ring Size (AS-568) : 017 Inner Diameter (In.) : 0.676 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-R1Q8-90L8-90L8	017	0.676	0.070	PECVD & HDPCVD	7-8 Weeks	$23.98	Starting at: $23.98	PRICE QTY $23.98
OR-AS 018 FFKM Kalrez 9100	O-Ring Size (AS-568) : 018 Inner Diameter (In.) : 0.739 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-URS7-90L8-90L8	018	0.739	0.070	PECVD & HDPCVD	7-8 Weeks	$24.76	Starting at: $24.76	PRICE QTY $24.76
OR-AS 019 FFKM Kalrez 9100	O-Ring Size (AS-568) : 019 Inner Diameter (In.) : 0.801 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-1094-90L8-90L8	019	0.801	0.070	PECVD & HDPCVD	7-8 Weeks	$26.28	Starting at: $26.28	PRICE QTY $26.28
OR-AS 020 FFKM Kalrez 9100	O-Ring Size (AS-568) : 020 Inner Diameter (In.) : 0.864 Cross Section (In.) : 0.070 Specification : PECVD & HDPCVD O-Ring Size Series : 000 Series Ships Within : 7-8 Weeks See more OR-AS-WD6-L1F7-90L8-90L8	020	0.864	0.070	PECVD & HDPCVD	7-8 Weeks	$28.06	Starting at: $28.06	PRICE QTY $28.06