AS-568 FFKM Kalrez 9100

AS-568 FFKM Kalrez 9100

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DuPont™ Kalrez® 9100 perfluoroelastomer parts are an amber translucent product targeted specifically for etching and deposition process applications, e.g., HDPCVD, PECVD, ALD, etc. It has also exhibited excellent performance in “select” ashing/stripping processes. Kalrez® 9100 has been specifically designed for low erosion and ultra-low particle generation in harsh plasma environments. It offers excellent thermal stability, very low outgassing as well as excellent elastomer recovery and mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300°C (572°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9100 parts

PERFORMANCE & SPECIFICATIONS

DuPont™ Kalrez® 9100 perfluoroelastomer parts are an amber translucent product targeted specifically for etching and deposition process applications, e.g., HDPCVD, PECVD, ALD, etc. It has also exhibited excellent performance in “select” ashing/stripping processes. Kalrez® 9100 has been specifically designed for low erosion and ultra-low particle generation in harsh plasma environments. It offers excellent thermal stability, very low outgassing as well as excellent elastomer recovery and mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300°C (572°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9100 parts

  •  Performance
    • Temperature Range (F) -15 to 572
    • Etching and deposition process applications, e.g., HDPCVD, PECVD, ALD
    • Designed for low erosion and ultra-low particle generation in harsh plasma environments
    • Excellent thermal stability, very low outgassing as well as excellent elastomer recovery
  • Not Compatible Withs
    • Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
    • Perfluorinated lubricants (PFPE)
Inner Diameter
Inner Diameter
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O-Ring Series
O-Ring Series
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Grouped product items
PART NUMBER O-Ring Size (AS-568) Inner Diameter (In.) Cross Section (In.) Specification O-Ring Size Series Ships Within
PRICE
ADD TO CART
OR-AS 001 FFKM Kalrez 9100

O-Ring Size (AS-568) 001

Inner Diameter (In.) 0.029

Cross Section (In.) 0.040

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $21.01
PRICE QTY
$21.01
OR-AS 002 FFKM Kalrez 9100

O-Ring Size (AS-568) 002

Inner Diameter (In.) 0.042

Cross Section (In.) 0.050

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $21.01
PRICE QTY
$21.01
OR-AS 003 FFKM Kalrez 9100

O-Ring Size (AS-568) 003

Inner Diameter (In.) 0.056

Cross Section (In.) 0.060

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $20.24
PRICE QTY
$20.24
OR-AS 004 FFKM Kalrez 9100

O-Ring Size (AS-568) 004

Inner Diameter (In.) 0.070

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $19.14
PRICE QTY
$19.14
OR-AS 005 FFKM Kalrez 9100

O-Ring Size (AS-568) 005

Inner Diameter (In.) 0.101

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $18.70
PRICE QTY
$18.70
OR-AS 006 FFKM Kalrez 9100

O-Ring Size (AS-568) 006

Inner Diameter (In.) 0.114

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $17.82
PRICE QTY
$17.82
OR-AS 007 FFKM Kalrez 9100

O-Ring Size (AS-568) 007

Inner Diameter (In.) 0.145

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $17.82
PRICE QTY
$17.82
OR-AS 008 FFKM Kalrez 9100

O-Ring Size (AS-568) 008

Inner Diameter (In.) 0.176

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock -12

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Starting at: $18.81
PRICE QTY
$18.81
OR-AS 009 FFKM Kalrez 9100

O-Ring Size (AS-568) 009

Inner Diameter (In.) 0.208

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $19.14
PRICE QTY
$19.14
OR-AS 010 FFKM Kalrez 9100

O-Ring Size (AS-568) 010

Inner Diameter (In.) 0.240

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock -10

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Starting at: $19.58
PRICE QTY
$19.58
OR-AS 011 FFKM Kalrez 9100

O-Ring Size (AS-568) 011

Inner Diameter (In.) 0.300

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $20.24
PRICE QTY
$20.24
OR-AS 012 FFKM Kalrez 9100

O-Ring Size (AS-568) 012

Inner Diameter (In.) 0.364

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $21.01
PRICE QTY
$21.01
OR-AS 013 FFKM Kalrez 9100

O-Ring Size (AS-568) 013

Inner Diameter (In.) 0.426

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $21.12
PRICE QTY
$21.12
OR-AS 014 FFKM Kalrez 9100

O-Ring Size (AS-568) 014

Inner Diameter (In.) 0.489

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $21.46
PRICE QTY
$21.46
OR-AS 015 FFKM Kalrez 9100

O-Ring Size (AS-568) 015

Inner Diameter (In.) 0.551

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $22.00
PRICE QTY
$22.00
OR-AS 016 FFKM Kalrez 9100

O-Ring Size (AS-568) 016

Inner Diameter (In.) 0.614

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $23.21
PRICE QTY
$23.21
OR-AS 017 FFKM Kalrez 9100

O-Ring Size (AS-568) 017

Inner Diameter (In.) 0.676

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $23.98
PRICE QTY
$23.98
OR-AS 018 FFKM Kalrez 9100

O-Ring Size (AS-568) 018

Inner Diameter (In.) 0.739

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $24.76
PRICE QTY
$24.76
OR-AS 019 FFKM Kalrez 9100

O-Ring Size (AS-568) 019

Inner Diameter (In.) 0.801

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $26.28
PRICE QTY
$26.28
OR-AS 020 FFKM Kalrez 9100

O-Ring Size (AS-568) 020

Inner Diameter (In.) 0.864

Cross Section (In.) 0.070

Specification PECVD & HDPCVD

O-Ring Size Series 000 Series

Ships Within 21 Weeks

Out of stock 0

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Starting at: $28.06
PRICE QTY
$28.06