DuPont™ Kalrez® 8575 perfluoroelastomer parts are a white product for “select” etching, ashing/stripping and deposition process applications. It offers low weight loss in Oxygen and Fluorine-Based Plasmas, low outgassing and excellent elastic recovery properties. Kalrez® 8575 has excellent vacuum and long-term sealing performance, good mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., gas inlets, chamber lid seals, slit valve door seals, etc.). A maximum continuous service temperature of 300°C (572°F) is suggested. Ultrapure Post-Cleaning and Packaging is standard for all parts made from Kalrez® 8575.

O-Ring Size (AS-568): 001
Inner Diameter (In.): 0.029
Cross Section (In.): 0.040
Specification: Etch, Ash/Strip
O-Ring Size Series: 000 Series