DuPont™ Kalrez® 9100 perfluoroelastomer parts are an amber translucent product targeted specifically for etching and deposition process applications, e.g., HDPCVD, PECVD, ALD, etc. It has also exhibited excellent performance in “select” ashing/stripping processes. Kalrez® 9100 has been specifically designed for low erosion and ultra-low particle generation in harsh plasma environments. It offers excellent thermal stability, very low outgassing as well as excellent elastomer recovery and mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300°C (572°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9100 parts

O-Ring Size (AS-568): 003
Inner Diameter (In.): 0.056
Cross Section (In.): 0.060
Specification: PECVD & HDPCVD
O-Ring Size Series: 000 Series