ClickCease

FFKM Kalrez 8002 O-Ring, Size 003, 0.056" ID x 0.060" CS

FFKM Kalrez 8002 O-Ring, Size 003, 0.056" ID x 0.060" CS
$29.62
Ships Within: 5 Weeks
SKU
OR-AS-DZY-7TF9-3XL6-3XL6

DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear, transparent product for ashing/stripping and “select” etching and deposition process applications, e.g., SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to “dry” process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8002 parts.


O-Ring Size (AS-568): 003
Inner Diameter (In.): 0.056
Cross Section (In.): 0.060
Specification: Low Particle Generation
O-Ring Size Series: 000 Series