AS-568 FFKM Kalrez 8002 O-Ring

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AS-568 FFKM Kalrez 8002 O-Ring

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DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear, transparent product for ashing/stripping and “select” etching and deposition process applications, e.g., SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to “dry” process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8002 parts.

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PERFORMANCE & SPECIFICATIONS

Performance

Temperature Range (F) -15 to 527
Ashing/stripping and “select” etching and deposition process applications
Ultra-low particle generation in oxygen and fluorine-based plasmas
Excellent resistance to “dry” process chemistry

Not Compatible Withs

Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
Perfluorinated lubricants (PFPE)

Material Datasheets

Kalrez 8002

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Grouped product items
PART NUMBER	O-Ring Size (AS-568)	Inner Diameter (In.)	Cross Section (In.)	Specification	O-Ring Size Series	PRICE	ADD TO CART
FFKM Kalrez 8002 O-Ring, Size 001, 0.029" ID x 0.040" CS	O-Ring Size (AS-568) 001 Inner Diameter (In.) 0.029 Cross Section (In.) 0.040 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-ZM3J-212M-212M	001	0.029	0.040	Low Particle Generation	5 Weeks 0Out of stock	$30.74	Starting at: $30.74	PRICE QTY $30.74
FFKM Kalrez 8002 O-Ring, Size 002, 0.042" ID x 0.050" CS	O-Ring Size (AS-568) 002 Inner Diameter (In.) 0.042 Cross Section (In.) 0.050 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-NQA4-07QD-07QD	002	0.042	0.050	Low Particle Generation	5 Weeks 0Out of stock	$30.74	Starting at: $30.74	PRICE QTY $30.74
FFKM Kalrez 8002 O-Ring, Size 003, 0.056" ID x 0.060" CS	O-Ring Size (AS-568) 003 Inner Diameter (In.) 0.056 Cross Section (In.) 0.060 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-7TF9-3XL6-3XL6	003	0.056	0.060	Low Particle Generation	5 Weeks 0Out of stock	$29.62	Starting at: $29.62	PRICE QTY $29.62
FFKM Kalrez 8002 O-Ring, Size 004, 0.070" ID x 0.070" CS	O-Ring Size (AS-568) 004 Inner Diameter (In.) 0.070 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-90L8-90L8-90L8	004	0.070	0.070	Low Particle Generation	5 Weeks 0Out of stock	$28.01	Starting at: $28.01	PRICE QTY $28.01
FFKM Kalrez 8002 O-Ring, Size 005, 0.101" ID x 0.070" CS	O-Ring Size (AS-568) 005 Inner Diameter (In.) 0.101 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-6TMQ-90L8-90L8	005	0.101	0.070	Low Particle Generation	5 Weeks 0Out of stock	$27.36	Starting at: $27.36	PRICE QTY $27.36
FFKM Kalrez 8002 O-Ring, Size 006, 0.114" ID x 0.070" CS	O-Ring Size (AS-568) 006 Inner Diameter (In.) 0.114 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-VJVX-90L8-90L8	006	0.114	0.070	Low Particle Generation	5 Weeks 0Out of stock	$26.07	Starting at: $26.07	PRICE QTY $26.07
FFKM Kalrez 8002 O-Ring, Size 007, 0.145" ID x 0.070" CS	O-Ring Size (AS-568) 007 Inner Diameter (In.) 0.145 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-P4ED-90L8-90L8	007	0.145	0.070	Low Particle Generation	5 Weeks 0Out of stock	$26.07	Starting at: $26.07	PRICE QTY $26.07
FFKM Kalrez 8002 O-Ring, Size 008, 0.176" ID x 0.070" CS	O-Ring Size (AS-568) 008 Inner Diameter (In.) 0.176 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-MV8H-90L8-90L8	008	0.176	0.070	Low Particle Generation	5 Weeks 0Out of stock	$27.52	Starting at: $27.52	PRICE QTY $27.52
FFKM Kalrez 8002 O-Ring, Size 009, 0.208" ID x 0.070" CS	O-Ring Size (AS-568) 009 Inner Diameter (In.) 0.208 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-17B5-90L8-90L8	009	0.208	0.070	Low Particle Generation	5 Weeks 0Out of stock	$28.01	Starting at: $28.01	PRICE QTY $28.01
FFKM Kalrez 8002 O-Ring, Size 010, 0.239" ID x 0.070" CS	O-Ring Size (AS-568) 010 Inner Diameter (In.) 0.239 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-JQVV-90L8-90L8	010	0.239	0.070	Low Particle Generation	5 Weeks 0Out of stock	$28.65	Starting at: $28.65	PRICE QTY $28.65
FFKM Kalrez 8002 O-Ring, Size 011, 0.300" ID x 0.070" CS	O-Ring Size (AS-568) 011 Inner Diameter (In.) 0.300 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-LK37-90L8-90L8	011	0.300	0.070	Low Particle Generation	5 Weeks 0Out of stock	$29.62	Starting at: $29.62	PRICE QTY $29.62
FFKM Kalrez 8002 O-Ring, Size 012, 0.364" ID x 0.070" CS	O-Ring Size (AS-568) 012 Inner Diameter (In.) 0.364 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-8DU4-90L8-90L8	012	0.364	0.070	Low Particle Generation	5 Weeks 0Out of stock	$30.74	Starting at: $30.74	PRICE QTY $30.74
FFKM Kalrez 8002 O-Ring, Size 013, 0.426" ID x 0.070" CS	O-Ring Size (AS-568) 013 Inner Diameter (In.) 0.426 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-W7Y7-90L8-90L8	013	0.426	0.070	Low Particle Generation	5 Weeks 0Out of stock	$30.89	Starting at: $30.89	PRICE QTY $30.89
FFKM Kalrez 8002 O-Ring, Size 014, 0.489" ID x 0.070" CS	O-Ring Size (AS-568) 014 Inner Diameter (In.) 0.489 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-3K18-90L8-90L8	014	0.489	0.070	Low Particle Generation	5 Weeks 0Out of stock	$31.39	Starting at: $31.39	PRICE QTY $31.39
FFKM Kalrez 8002 O-Ring, Size 015, 0.551" ID x 0.070" CS	O-Ring Size (AS-568) 015 Inner Diameter (In.) 0.551 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-N1Y5-90L8-90L8	015	0.551	0.070	Low Particle Generation	5 Weeks 0Out of stock	$32.18	Starting at: $32.18	PRICE QTY $32.18
FFKM Kalrez 8002 O-Ring, Size 016, 0.614" ID x 0.070" CS	O-Ring Size (AS-568) 016 Inner Diameter (In.) 0.614 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-KMLK-90L8-90L8	016	0.614	0.070	Low Particle Generation	5 Weeks 0Out of stock	$33.96	Starting at: $33.96	PRICE QTY $33.96
FFKM Kalrez 8002 O-Ring, Size 017, 0.676" ID x 0.070" CS	O-Ring Size (AS-568) 017 Inner Diameter (In.) 0.676 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-R1Q8-90L8-90L8	017	0.676	0.070	Low Particle Generation	5 Weeks 0Out of stock	$35.08	Starting at: $35.08	PRICE QTY $35.08
FFKM Kalrez 8002 O-Ring, Size 018, 0.739" ID x 0.070" CS	O-Ring Size (AS-568) 018 Inner Diameter (In.) 0.739 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-URS7-90L8-90L8	018	0.739	0.070	Low Particle Generation	5 Weeks 0Out of stock	$36.22	Starting at: $36.22	PRICE QTY $36.22
FFKM Kalrez 8002 O-Ring, Size 019, 0.801" ID x 0.070" CS	O-Ring Size (AS-568) 019 Inner Diameter (In.) 0.801 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-1094-90L8-90L8	019	0.801	0.070	Low Particle Generation	5 Weeks 0Out of stock	$38.45	Starting at: $38.45	PRICE QTY $38.45
FFKM Kalrez 8002 O-Ring, Size 020, 0.864" ID x 0.070" CS	O-Ring Size (AS-568) 020 Inner Diameter (In.) 0.864 Cross Section (In.) 0.070 Specification Low Particle Generation O-Ring Size Series 000 Series Ships Within 5 Weeks Out of stock 0 See more OR-AS-DZY-L1F7-90L8-90L8	020	0.864	0.070	Low Particle Generation	5 Weeks 0Out of stock	$41.05	Starting at: $41.05	PRICE QTY $41.05