Tag Archives: Kalrez 9100

Kalrez® Seals for Semiconductor Processing

Purity is critical to high wafer yield, and Kalrez® seals are designed with properties that help reduce contamination from particulates, outgassing and extractables.

Semiconductor Processing Seals

Kalrez® Seals - Semiconductor ProcessingKalrez® seals for semiconductor processing are field-proven in the manufacture of semiconductor chips.

They can help extend planned maintenance intervals, and thereby lower long-term cost of ownership, in a wide range of semiconductor processes. In a number of fabrication customer evaluations, Kalrez®seals exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers, in both static and dynamic sealing applications.

Operational Improvements

Kalrez® seals can help improve semiconductor manufacturing in a range of wafer-fabricating operations, including:

  • Deposition
  • Etch
  • Ash/strip
  • Thermal
  • Wet

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