chamber cleaning
- September 05, 2017
Purity is critical to high wafer yield, and Kalrez® seals are designed with properties that help reduce contamination from particulates, outgassing and extractables.
In a number of fabrication customer evaluations, Kalrez®seals exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers, in both static and dynamic sealing applications.
Operational Improvements
Kalrez® seals can help improve semiconductor manufacturing in a range of wafer-fabricating operations, including:
- Deposition
- Etch
- Ash/strip
- Thermal
- Wet
