DuPont™ Kalrez® 8575 perfluoroelastomer parts are a white product for “select” etching, ashing/stripping and deposition process applications. It offers low weight loss in Oxygen and Fluorine-Based Plasmas, low outgassing and excellent elastic recovery properties. Kalrez® 8575 has excellent vacuum and long-term sealing performance, good mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., gas inlets, chamber lid seals, slit valve door seals, etc.). A maximum continuous service temperature of 300°C (572°F) is suggested. Ultrapure Post-Cleaning and Packaging is standard for all parts made from Kalrez® 8575.
PERFORMANCE
- Temperature Range (F) -15 to 572
- “Select” etching, ashing/stripping and deposition process applications
- Offers low weight loss in Oxygen and Fluorine-Based Plasmas, low outgassing and excellent elastic recovery properties
- Excellent vacuum and long-term sealing performance
- Excellent resistance to oxygen and fluorine-based plasmas, as well as chlorinated cleaning gasses (e.g., CIF3)
- Very low weight loss in reactive plasmas
- Very low outgassing properties
Excellent (low) compression set properties - Excellent elastic recovery properties
APPLICATIONS
- Chamber lids
- Gas inlets
- Quartz windows
- Throttle valves
- Other plasma applications
NOT COMPATIBLE WITHS
- Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
- Perfluorinated lubricants (PFPE)
MATERIAL DATASHEETS
Not sure which Kalrez is right for you? Contact Gallagher Fluid Seals for assistance with all perfluoroelastomer (FFKM) needs.