NEW White Paper Available!
Gallagher Fluid Seals recently added a new white paper to its Resources Page, Perfluoroelastomers for the Semiconductor Industry, written by Russ Schnell. Below is an excerpt from the new white paper discussing the key reasons to choose perfluoroelastomers over fluoroelastomers for semiconductor manufacturing. You can download the white paper in its entirety by clicking on the thumbnail to the right.
Perfluoroelastomers (e.g. Kalrez® parts), often replace fluoroelastomer (e.g. Viton®) in semiconductor applications. However, even though perfluoroelastomers are the highest performance elastomers, there are still subtle differences between products. It is suggested that the elastomer supplier be contacted regarding the optimum product and seal design for specific applications. As mentioned above the key characteristics of perfluoroelastomers include:
- Lower offgassing than other elastomers, especially at temperatures above 200°C, which lowers the risk of product contamination.
- Better sealing force retention (lower compression set) at temperatures over 200°C, which is critical for longer service.
Best overall chemical resistance of any elastomer family. - Formulations with extremely low particle generation in aggressive process environments.
- Generally higher gas permeation than fluoroelastomers.
- Higher coefficient of thermal expansion when compared to fluoroelastomers. Proper seal design will account for this and optimize performance.

About the Author

Russ received a Bachelor of Science in Chemical Engineering from Columbia University in New York and MBA from the University of Delaware.

